JPH059723B2 - - Google Patents

Info

Publication number
JPH059723B2
JPH059723B2 JP58052353A JP5235383A JPH059723B2 JP H059723 B2 JPH059723 B2 JP H059723B2 JP 58052353 A JP58052353 A JP 58052353A JP 5235383 A JP5235383 A JP 5235383A JP H059723 B2 JPH059723 B2 JP H059723B2
Authority
JP
Japan
Prior art keywords
interference
light
wavelength
measured
minute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58052353A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59178304A (ja
Inventor
Toshihiko Nakada
Yoshitada Oshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58052353A priority Critical patent/JPS59178304A/ja
Publication of JPS59178304A publication Critical patent/JPS59178304A/ja
Publication of JPH059723B2 publication Critical patent/JPH059723B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58052353A 1983-03-30 1983-03-30 微小間隙測定方法及び装置 Granted JPS59178304A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58052353A JPS59178304A (ja) 1983-03-30 1983-03-30 微小間隙測定方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58052353A JPS59178304A (ja) 1983-03-30 1983-03-30 微小間隙測定方法及び装置

Publications (2)

Publication Number Publication Date
JPS59178304A JPS59178304A (ja) 1984-10-09
JPH059723B2 true JPH059723B2 (en]) 1993-02-05

Family

ID=12912441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58052353A Granted JPS59178304A (ja) 1983-03-30 1983-03-30 微小間隙測定方法及び装置

Country Status (1)

Country Link
JP (1) JPS59178304A (en])

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174211U (en]) * 1986-04-25 1987-11-05
JPS63205503A (ja) * 1987-02-20 1988-08-25 Mitsubishi Electric Corp 微小すきまの光学的測定装置
JP2574807B2 (ja) * 1987-08-28 1997-01-22 株式会社日立製作所 膜厚分布測定方法及びその装置
JP2786270B2 (ja) * 1989-09-27 1998-08-13 株式会社日立製作所 干渉式傾きもしくは高さ検出装置並びに縮小投影式露光装置及びその方法
US5457534A (en) * 1991-10-23 1995-10-10 Phase Metrics Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
JPH0827178B2 (ja) * 1992-11-06 1996-03-21 日本アイ・ビー・エム株式会社 ヘッド浮上量測定装置
JP5154098B2 (ja) * 2006-03-15 2013-02-27 日立マクセル株式会社 スペーシング計測装置及び計測方法
JP5222505B2 (ja) * 2007-08-24 2013-06-26 国立大学法人 香川大学 微小物体の光学的計測装置
KR100941981B1 (ko) * 2007-11-06 2010-02-11 한국표준과학연구원 레이저 간섭계식 메코메타
JP5701159B2 (ja) * 2010-06-24 2015-04-15 東レエンジニアリング株式会社 干渉縞モデル適合による表面形状測定方法およびその装置
JP2012154765A (ja) * 2011-01-26 2012-08-16 Rexxam Co Ltd 光学的計測装置

Also Published As

Publication number Publication date
JPS59178304A (ja) 1984-10-09

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